A temperature drift calibration device of a piezoresistive pressure sensor

The utility model provides a temperature drift calibration device of a piezoresistive pressure sensor. The temperature drift calibration device comprises a thermal combined tester, a water injecting container, a metal gas cylinder, a piezoresistive pressure sensor, a data sampler, a temperature sensor, a precise digital pressure gauge, a force pump, and a calibration module. The temperature drift calibration device resolves a problem of over complex wiring and a high-cost attemperator of a conventional calibration device and has characteristics of simple structure, low implementation cost, high calibration precision, substantially-suppressed amplitude of temperature drift of the pressure sensor, and increased anti-temperature-interference capability of the system.