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Bidirectional Folding with Atomic Layer Deposition Bimorphs for Autonomous Micro-Origami
Bidirectional Folding with Atomic Layer Deposition Bimorphs for Autonomous Micro-Origami
2019
Itai Cohen
Baris Bircan
Marc Z. Miskin
Robert J. Lang
Kyle Dorsey
Paul L. McEuen
Keywords:
Atomic layer deposition
Nanotechnology
Materials science
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