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Enabling epitaxy on ultrathin implanted SOI
Enabling epitaxy on ultrathin implanted SOI
2011
L. Grenouillet
Nicolas Posseme
Shom Ponoth
Nicolas Loubet
V. Destefanis
Y. Le Tiec
Sanjay C. Mehta
Arvind Kumar
Qing Liu
B. Haran
Kangguo Cheng
N. Berliner
J. Fullam
J. Kuss
Ghavam G. Shahidi
O. Faynot
Bruce B. Doris
M. Vinet
Keywords:
Nanotechnology
Silicon on insulator
Epitaxy
Materials science
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