Species mask, exposure apparatus and exposure method

The present invention provides a kind of mask, exposure apparatus and exposure method. The mask comprising a substrate and a plurality of openings disposed in a pattern on a substrate, when exposed to the target substrate by using the mask, the opening pattern of the first region of the substrate to light through a second region of the substrate is greater the amount of transmitted light, so that the first region than the second region of the light can be compensated for the second region corresponding to the product area width permeation amount, so that the product of the width of the actuator than a set value; the the first and second regions on a substrate for the two regions. Said exposure means comprises any of embodiments of the present invention is provided in the mask embodiments. The present invention provides an exposure method, using an exposure apparatus according to any embodiment of the present invention provides for the target substrate is exposed.