Simulation of Temperature Distribution for Large Sized Ceramic Substrates in Vertical Type Sintering Furnace

The temperature distribution in large sized ceramic substrates at 1600°C sintered by vertical type furnace was simulated by using a model of heat conduction and radiation heat transfer. The temperature distribution at the center of each ceramic substrate is larger than that in each ceramic substrate at steady state in the case of 3 substrates were fired. The temperature distribution becomes narrow by using a high thermal conductivity material setter or inserting heat insulating material between the bottom setter and the furnace floor. The temperature distribution in each ceramic substrate is closely related to the distance between the surface of the ceramic substrate and the bottom of the upper setter.