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Wafer scale process for manufacturing optical waveguide devices, and thus produced optical waveguide devices
Wafer scale process for manufacturing optical waveguide devices, and thus produced optical waveguide devices
2007
Benjamin F. Catching
Donald M. Friedrich
Charles A. Hulse
Gunten Marc K Von
Jason Reed
Karl Kissa
Glen Drake
Julia Duncan
Hiren V. Shah
Jerry Zieba
Xu Jason Jiazhan
William J. Minford
Keywords:
Waveguide (optics)
Wafer
Electronic engineering
Materials science
Optoelectronics
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