Old Web
English
Sign In
Acemap
>
Paper
>
Low Dielectric Constant Materials for Bottom Antireflective Coating Layers in ArF Lithography
Low Dielectric Constant Materials for Bottom Antireflective Coating Layers in ArF Lithography
2001
Hsuen-Li Chen
H. C. Cheng
M Y Li
F-H Ko
T. Y. Huang
T. C. Chu
Keywords:
Dielectric
Lithography
Optics
Anti-reflective coating
Materials science
Optoelectronics
Correction
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]