High-quality and large-area echelle grating ruled on the CIOMP-6 ruling engine for the Fiber Arrayed Solar Optical Telescope (FASOT)

A 300 mm×500 mm large-area echelle grating with groove density of 79 grooves/mm is fabricated for the spectrometer of the fiber array solar optical telescope (FASOT). This paper focusses on measurement methods of the grating performance. We present a method to evaluate the grating’s stray light intensity, which is measured to a level of 10−4. The directly measured grating efficiency is approximately 90% of the designed value, and an indirect measurement method based on the grating groove profile is proposed. Based on the Rayleigh criterion and the grating diffraction wavefront, a physical optics method and a geometric grating method are proposed and are used to calculate the actual grating resolving power; the calculated results exceed 95% of the grating’s theoretical resolving power. These results show that the CIOMP-6 ruling engine has sufficient precision to fabricate high-quality, large-area echelle gratings.