Development of Nanoscale Thermocouple Probes for Local Thermal Measurements

We developed thermocouple probes consisting of constantan and chromel segments with nanoscale sharpness. The ends of wires made of these alloys were polished utilizing a single step drop-off electrochemical procedure in a H3PO4 solution. The macroscopic shapes of the etched wires were designed to detect ultra-small heat inputs with high sensitivity after assembling a thermocouple. After electrochemical treatment, ultimately smooth, mirror-polished wire surfaces were observed. The etched wires were then assembled in a transmission electron microscope (TEM) to create a miniature thermocouple by using which we successfully detected a small temperature increase induced by focused TEM electron beam irradiation. Judging from high- resolution TEM imaging, a thermocouple with the tip-end of only ~5 nm in diameter was fabricated.