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Developing and Integrating TCAD Applications with the Semiconductor Wafer Representation
Developing and Integrating TCAD Applications with the Semiconductor Wafer Representation
1992
D. Bonning
Goodwin Chin
R Cottle
W. Dietrich
S. Duvall
Martin D. Giles
R. Harris
Michael Karasick
N Khalil
Mark E. Law
M. J. McLennan
Purnendu K. Mozumder
Lee R. Nackman
S. Nassif
V. T. Rajan
D. Schroeder
R. Tremain
Duncan M. Hank Walker
Robert H. Wang
Alexander Wong
Keywords:
Software construction
Semiconductor device modeling
Software prototyping
Data structure
Computer engineering
Computer-aided manufacturing
Software development process
Wafer
Software development
Manufacturing engineering
Engineering
Systems engineering
Correction
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