Growth of polycrystalline tubular silicon carbide Yajima-type reaction at the vapor-solid interface

2007 
Polycrystalline tubular SiC on Si is prepared by reacting MeSiHCl 2 vapor and Ca thin film on Si at 773-923 K followed by heat treatment at 1273 K. The reaction is a solvent-free Yajima-type process taking place at the vapor-solid interface. The products phase-segregate into a cable-like radial heterostructure composed of a core of CaCl 2 and a shell of SiC x H y . After removal of the CaCl 2 core, the layer of polycrystalline SiC tubes on Si can emit electrons at a low applied field of 2.5 V/μm with a current of 10 μA/cm 2 .
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