A MEMS-Based Piezoelectric Pump with a Low Frequency and High Flow

This paper mainly presents a piezoelectric pump based on a single piezoelectric vibrator under MEMS technology. The piezoelectric vibrator of the piezoelectric pump is made by MEMS technology, and the pump body is completed by 3D printing. Driven by a low-frequency AC voltage of 220 V 50 Hz, the center displacement of the piezoelectric vibrator of the pump can reach 136 μm with high output characteristic. Finally, the piezoelectric pump was used to perform a cooling test on the heating sheet PTC under the condition of 26 °C. It was found that the temperature of the PTC could be reduced by about 20 °C under the condition of the maximum output flow of 159 ml/min. Therefore, the piezoelectric pump has important practical significance in many aspects such as micro flow control and computer CPU cooling.