A 16-bit ultra-thin tri-axes capacitive microaccelerometer for mobile application

A 16-bit ultra-thin tri-axes capacitive microaccelerometer is presented, where tri-axes MEMS (microrlectromechanical systems) sensing elements, capacitive readout ASIC (application specific integrated circuit), and EEPROM (electrically erasable and programmable read only memory) are integrated to an ultra-thin LGA (land grid array) package. The input range and input-output non-linearity of x/y-axis channel is measured to be plusmn1.5 g and 0.35% FSO, respectively. The input range and input-output non-linearity of z-axis accelerometer channel are measured to be plusmn1.5 g and 0.19% FSO, respectively. The fabricated microaccelerometer system is suitable for many applications, including robots, game interfaces and mobile phone input interfaces.