Formation of an active part of inertial mass based piezoelectric nanogenerator

Zinc oxide piezoelectric nanorstructured coatings were formed on tantalum and aluminum substrates by the chemical solution methods. The methods mentioned above are suitable for formation of active parts of inertial mass based piezoelectric nanogenerator (PENG). This PENGs design using leads to an enhanced output due to the increased effective active parts area. Obtained nanostructured ZnO coatings were investigated by scanning electron microscopy and atomic force microscopy.