Fabrication of vertical coupled polymer microring resonator - art. no. 60251F

In this paper, a new fabricating strategy for polymer microring resonators vertically coupled to a bus waveguide is developed. A carefully engineered Al masking process is utilized to compensate the local concave of the buried waveguide formed by polymer spin-coating, realizing perfectly flat top surface of the buried bus waveguide. A serial of the vertically coupled polymer microring resonator showing excellent topology was fabricated with this strategy. The resonance phenomenon is oberved in a PMMA-based microring resonators using this fabricating strategy The suggested approach is suitable to fabricate vertically coupled polymer micro-resonators.