Flat diaphragm type gas flow sensor and method of producing the same

The invention discloses a diaphragm gas flow sensor and a production method thereof, relates to the field of flow sensors, solves the disadvantages that the structure of gas flow sensors has larger size, higher power consumption and higher cost, and is not easy for batch production, and adopts the following structure: an insulating layer is respectively generated on an upper surface and a lower surface of a monocrystal silicon plate, and a transition layer and a sensitive metal layer are orderly generated on the upper insulating layer and sculptured into a heating resistance, a temperature measuring thermistance and a control resistance, which are parallel; an electrode runs though an inactive protecting layer that covers the upper surface of the monocrystal silicon plate and is connected with the sensitive metal layer, and the bottom of the monocrystal silicon plate is opened with a sediment slot and a rectangular diversion trench in the directions respectively parallel and vertical to the sculpture direction of the resistances. The production method of the diaphragm gas flow sensor orderly prepares the insulating layer, a bottom corrosion aperture, the sensitive metal layer, a metallic film resistance, the inactive protecting layer, a wiring orifice, the electrode, and the sediment slot and the rectangular diversion trench that take the cup-shaped cross sections, thus finishing the production. The production method of the diaphragm gas flow sensor raises the stability and the reliability of the sensor, and is characterized by quick response speed, high sensitivity and low power consumption.