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Reactive Ion Etching (RIE) of Polyimidesiloxanes
Reactive Ion Etching (RIE) of Polyimidesiloxanes
1991
S. Jeng
M. Xu
Hoi Sing-Kwok
D.Y. Tang
H.R. Acharya
Keywords:
Reactive-ion etching
Inorganic chemistry
Chemistry
Materials science
Chemical engineering
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