Evalution of Excimer Lasers: A Review

This paper reveals the latest emerging applications and trends of Excimer laser in industry. The widely known areas of applications viz. material processing, engineering, metrology, scientific research, medical diagnostics tool, communications, holography and of course military applications are emphasized here. The most recent advances in the application scenario like nano science and engineering are described elaborately. Among all industrial lasers, Excimer lasers are becoming the most important and widely accepted tool to carry out various applications in the industry, specially in micromachining and marking applications. The paper describes a detailed theoretical case study of a small Excimer laser and its comparison with conventional Excimer laser. The various latest applications of small Excimer laser are also described here.