New Fabrication Method of Channel Optical Waveguides of Organic Crystal Using an Inorganic Photoresist

A microlithographic technique applicable to optical waveguides made of organic crystals is described. The new technique consists in the use of a water-soluble inorganic photoresist followed by wet or dry etching. Since the process is organic-solvent free and does not require high-temperature baking, it should be applicable to a wide range of organic crystals.