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Influence of nitrogen implantation into the buried oxide on the radiation hardness of silicon-on-insulator wafers
Influence of nitrogen implantation into the buried oxide on the radiation hardness of silicon-on-insulator wafers
2010
Tang
Hai Ma
Zheng
Zhong Shan
Zhang
En-Xia
Yu
Fang
Li
Ning
Wang
Ning Juan
Keywords:
Radiation hardening
Wafer
buried oxide
Materials science
Nitrogen
Silicon on insulator
Optoelectronics
Correction
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