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Study of Ni-Silicide Contacts to Si:C Source/Drain.
Study of Ni-Silicide Contacts to Si:C Source/Drain.
2006
S. Mertens
Y. Cho
Faran Nouri
Robert Schreutelkamp
Yihwan Kim
Peter Verheyen
Johnny Steenbergen
C. Vrancken
Hugo Bender
Olivier Richard
Benny Van Daele
Wilfried Vandervorst
P. Absil
S. Kubicek
Caroline Demeurisse
Zsolt Tokei
Anne Lauwers
Luc Geenen
Keywords:
Silicide
Materials science
Metallurgy
Correction
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