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A 1D model for design and predicting dynamic behavior of out-of-plane MEMS
A 1D model for design and predicting dynamic behavior of out-of-plane MEMS
2018
JingLun Li
Changting Xu
John A. Tichy
Diana-Andra Borca-Tasciuc
Keywords:
Materials science
Electronic engineering
Microelectromechanical systems
Mechanical engineering
out of plane
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