Plasma shield apparatus and plasma light source apparatus

A realizing plasma shielding apparatus and a plasma light source apparatus suppressed occurrence of debris. A plasma shield apparatus according to the present invention, the generated high temperature plasma The plasma shielding device for shielding the first and second facing each other across an inner space (40a), the inner space of comprising an opening (40b, 40c) and a hollow body having a (40). The hollow body is constituted by a single crystal of silicon carbide. During operation of the plasma generating apparatus, the inner space of the hollow body forms a discharge space in which the plasma is generated, a discharge gas is supplied to the inner space through the first opening, the EUV light from the second opening including plasma light is emitted. .FIELD 1