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Influence of beam geometry on the dielectric charging of RF MEMS switches
Influence of beam geometry on the dielectric charging of RF MEMS switches
2011
Solazzi
Resta
Mulloni
Margesin
Farinelli
Keywords:
Dielectric
Stress (mechanics)
Microelectromechanical systems
Optoelectronics
beam geometry
Radio frequency
Materials science
Correction
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