A method for optimizing a simulated optical system

The invention relates to a method for optimizing a simulated optical system by n parameters x x is described, the method comprising the steps of: a) determining from m optical paths f b) determining an actual value OPL an optical path length OPL c) determining a total deviation d of the actual values OPL of predetermined setpoints UPL the optical path length OPL d) for the case that the total deviation d is greater than the predetermined threshold value d - selecting at least one parameter x - determining a Jacobian J with the matrix elements - determining a parameter change Ax for all i. e) replacing the values x the parameters to be varied by x and repeating steps a) to e) until the total deviation d) is less than the predetermined maximum value d