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Wafer-Scale Growth of a MoS2 Monolayer via One Cycle of Atomic Layer Deposition: An Adsorbate Control Method
Wafer-Scale Growth of a MoS2 Monolayer via One Cycle of Atomic Layer Deposition: An Adsorbate Control Method
2021
Dae Hyun Kim
Jae-Chan Park
Jeongwoo Park
Deok-Yong Cho
Woo-Hee Kim
Bonggeun Shong
Ji-Hoon Ahn
Tae Joo Park
Keywords:
Chemical physics
Thin film
Wafer
Monolayer
scale
Oxide
Atomic layer deposition
control methods
Materials science
Correction
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