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Analyzing Copper Etching Dynamics by Hybridizing AFM Controlled SECM with Raman MicroSpectroscopy
Analyzing Copper Etching Dynamics by Hybridizing AFM Controlled SECM with Raman MicroSpectroscopy
2018
Aaron Lewis
Yirmi Bernstein
Yossi Bar-David
Dmitry Lev
Rimma Dechter
Sofia Kokotov
Oleg Fedosyesyev
Keywords:
Raman spectroscopy
Nanotechnology
Etching
Atomic force microscopy
Copper
Materials science
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