Stable, Extrinsic, Field Effect Passivation for Back Contact Silicon Solar Cells

A new technique is described by which ionic species can be rapidly transported into oxide films, and once there provide effective and stable field effect passivation to silicon surfaces. Field effect passivation in thermally grown oxide films has been achieved by embedding potassium ions using a combined drift and diffusion mechanism at high temperature. This process has been shown to be over 10 times faster than a pure diffusion process. The resulting passivation stable for periods exceeding 600 days, with lifetimes reaching 1.4 ms, equivalent to a surface recombination velocity (SRV) ≤ 5.7 cm/s, on 1 Ωcm, n-type, FZ-Si.