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Studies on Electrolytic Buffing of Single Crystal Silicon:Use of Electrolyte without Abrasives (1st Report)
Studies on Electrolytic Buffing of Single Crystal Silicon:Use of Electrolyte without Abrasives (1st Report)
1976
Nhan Van Huynh
Hitoshi Tokura
Masanori Yoshikawa
Toshio Asaeda
Keywords:
Single crystal
Polishing
Metallurgy
Materials science
Silicon
single crystal silicon
Electrolyte
Correction
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