Optical Nanoimprint using Plastic Template and Visible Light-Curable Resin

To eliminate the releasing defects of template in UV nanoimprint lithography (NIL), a novel process without using anti-sticking layer is proposed in combination with a plastic template and a visible light (VL)-curable resin. We newly use poly-propylene (PP) as a plastic template, which has low surface energy and is easily removed from polymers. However, plastic materials such as PP have generally poor transmittance for UV light, but have certain transmittance for VL. We apply a newly developed VL-curable resin for use of the plastic template. Using the VL-curable resin, the anti-reflection structure is successfully fabricated on a triacetylcellulose (TAC) film by the optical NIL from the PP template. With respect to the anti-reflection structure, the experimental result of reflectance shows less than 0.5%.