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Formation behavior of oxygen precipitates in ultra-high temperature RTP wafers
Formation behavior of oxygen precipitates in ultra-high temperature RTP wafers
2018
Haruo Sudo
Hideyuki Okamura
Susumu Maeda
Tatsuhiko Aoki
Kozo Nakamura
Koji Sueoka
Keywords:
Radiochemistry
Oxygen
Wafer
Precipitation (chemistry)
Materials science
Silicon
oxygen precipitation
Chemical engineering
oxygen precipitates
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