Planar grating demultiplexers using silicon nanowire technology with flat passband and low crosstalk

A design and fabrication for planar grating demultiplexers based on a nano silicon platform are presented to obtain both a flat passband and a low crosstalk using the optimal size and structure for each grating facet. Measured results show a ∼−30 dB crosstalk and a ∼70 GHz 3 dB bandwidth can be obtained with acceptable additional loss.