Development of an electromagnetically actuated mercury microvalve

1998 
The development of microscale fluid handling components has been recognized as a crucial element in the design of microscale chemical detection systems. Recently, work has been undertaken at Sandia National Laboratories to construct a valve that uses a small mercury droplet to control the flow of gas through capillary passages. Electromagnetic forces that are provided by small permanent magnets and a current supply are used to drive the mercury into position. Driving the mercury droplet into a tapered passage halts gas flow through a capillary, while surface tension forces prevent the mercury from passing through the passage. Models have been developed to describe the movement of the mercury droplet and the sealing of the gas passage, and millimeter-scale units have been tested to explore design options. Predictions from the model show that a valve with 10 micron sized features can seal against pressures up to 1.5 atmospheres. Experiments have highlighted the promise of mercury valves and demonstrated problems that can arise from contamination of the mercury.
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