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Tantalum or tungsten target - copper alloy backing plate assembly and a manufacturing method thereof
Tantalum or tungsten target - copper alloy backing plate assembly and a manufacturing method thereof
2000
hirohito miyasita
kunihiro oda
takeo okabe
Keywords:
Tungsten
Copper
Alloy
Tantalum
Metallurgy
Materials science
copper alloy
tungsten target
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