Infrared sensors based on multi-wall carbon nanotube films

Abstract In order to fabricate novel infrared sensors, dense films of multi-wall carbon nanotubes have been grown on silicon and alumina substrates, using Plasma enhanced Chemical Vapour Deposition technique. The physical and optical characteristics of the devices were studied using a variety of methods. The carbon nanotube on silicon device showed a peak response at a wavelength of 1.02 μm. The infrared response of the carbon nanotube on alumina device showed that the detection behavior was consistent with a bolometric effect. Measurements have also revealed a wide spectral response from the visible to the long-wave infrared for that sample.