Turbomolecular high-vacuum pump bearings diagnostics using temperature and vibration measurements

2021 
Turbomolecular pumps are devices designed to obtain and maintain high vacuum. These are based on the principle that momentum can be given to gas molecules by collision with a moving solid surface. Hence, a multiple-stages fan rotor must spin at very high speeds to obtain the desired effect, leading to critical issues related to friction. When rolling elements bearings are employed to support the rotor shaft, these become the weakest link in the chain, so that diagnostic systems could be desirable to monitor the health state of such components. In this work temperature and vibration sensors are tested for this purpose using an endurance test rig running a turbomolecular pump to failure.
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