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Characterization methods of relative permittivity of silicon-based passive components dielectric thin film
Characterization methods of relative permittivity of silicon-based passive components dielectric thin film
2017
Wang Xiaolei
Ma Ding
Qin Zhen
Chen Wenbin
Yang Daoguo
Cai Miao
Keywords:
silicon based
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Science, technology and society
Chemical substance
Relative permittivity
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Materials science
Electronic component
Optoelectronics
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