Test Method and apparatus for secondary electron emission coefficient of the material under full angle of incidence

A method and apparatus for secondary electron emission coefficient of the material under the angle of incidence of the full test, involving physical electronics field; the method comprising: step 1, the sample placed in a vacuum chamber of the sample stage; collecting portion quarter Spherical electron collection means located on the half-space; step 2, the rotary sample stage, the sample so that the inclination angle [theta] needed for testing, the test electronics collection means I1 is the current flowing in; step 3, the rotary sample stage, so that the sample direction opposite the inclination angle [theta], I2 is the test current; step four, holding the sample, and place the electronic device is rotated to the second half of the collecting space, I3 of the test current; step 5, the test current Ip incident electrons; the incident angle [theta] obtained under the secondary electron emission coefficient δ; the present invention has the test results are accurate, the advantages of simple operation, to overcome the prior art global operating pole type collector part of the difficulty, hemispherical collect electrons can not be collected, method of biasing impact test results and other issues.