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Formation and Dissolution of Mesoporous Layer during Metal-Particle-Assisted Etching of n-Type Silicon
Formation and Dissolution of Mesoporous Layer during Metal-Particle-Assisted Etching of n-Type Silicon
2021
Ayumu Matsumoto
Keishi Iwamoto
Yuki Shimada
Kyohei Furukawa
Shun Majima
Shinji Yae
Keywords:
metal particle
Dissolution
Mesoporous material
n type silicon
Etching
Materials science
Chemical engineering
Correction
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