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Adaptive Mesh Refinement For Multilayer Process Simulation
Adaptive Mesh Refinement For Multilayer Process Simulation
1990
Bruno Baccus
Dominique Collard
Emmanuel Dubois
Keywords:
Mesh generation
Adaptive mesh refinement
Process simulation
Doping
Bipolar junction transistor
Finite element method
Materials science
Silicon
Electronic engineering
Voltage
Correction
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