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Lateral Straggling of Ion Implantation Distributions in 4H-SiC Investigated by SIMS
Lateral Straggling of Ion Implantation Distributions in 4H-SiC Investigated by SIMS
2019
Johanna Müting
Viktor Bobal
Alexander Azarov
Bengt Gunnar Svensson
Ulrike Grossner
Keywords:
Metallurgy
Materials science
Ion implantation
Composite material
Correction
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