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Effect of Mixed Ga Metal for AlN Growth by Using Hydride Vapor-Phase Epitaxy
Effect of Mixed Ga Metal for AlN Growth by Using Hydride Vapor-Phase Epitaxy
2017
Injun Jeon
Sung Geun Bae
Min Yang
Sam Nyung Yi
Hyung Soo Ahn
Hunsoo Jeon
Kyoung Hwa Kim
Jae Hak Lee
Suck-Whan Kim
Keywords:
Hydride
Epitaxy
Chemistry
Inorganic chemistry
Metal
Analytical chemistry
vapor phase
Materials science
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