A 3 PPM/°C Temperature Coefficient of Scale Factor for a Silicon Resonant Accelerometer Based on Crystallographic Orientation Optimization

We propose a method for improving the temperature stability of the scale factor for silicon resonant accelerometer (SRA) based on crystallographic orientation optimization for the first time. The approach is a passive compensation per se that changes the temperature drift of Young's modulus via rotating the vibration axis of the device to a specific crystal orientation angle, thereby significantly reducing the temperature coefficient of the scale factor (TCS). Experimental results show that a TCS of 3ppm/°C is obtained with a 33.75° orientation SRA without any post-processing compensation, which is ∼8.6-fold reduced compared with the conventional 0° orientation device and show good agreement with the simulation results. Moreover, the overall variation of the scale factor can be further decreased to only 2.98ppm from −10 °C to 70 °C after simple polynomial compensation, which is a considerably competitive result among the previously reported results in literatures.