Two-Parameter Pressure and Temperature Measuring Transducer Based on a Voltage-Controlled MEMS-Elements

In this paper the authors propose electrostatic multi-parameter measuring MEMS-transducer with shock excitation of a movable electrode. the multidimensional basis of output signals generated by a two-parameter measuring transducer under conditions of shock excitation of voltage-controlled movable MEMS-electrodes in electrostatic capacitor has been constructed. The peculiar features of a two-parameter sensor for measuring pressure and temperature are considered. Simulation of a two-parameter measuring transducer has been carried out and its calibration characteristics have been obtained.