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High density plasma production in a multicusp plasma generator with RF antenna
High density plasma production in a multicusp plasma generator with RF antenna
1992
Y. Suzuki
Masaya Hanada
Yoshikazu Okumura
M Tanaka
Keywords:
Antenna (radio)
Copper
Optoelectronics
Current density
Materials science
high density
Insulator (electricity)
Radio frequency
plasma generator
Plasma
Correction
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