Observer techniques applied to the control of piezoelectric Microactuators.

We present here the use of sensors, observers and self-sensing techniques to control piezoelectric actuators, particularly piezocantielevers. First, the feedback control with full measurements (all variables are measured) is presented. Because of the lack of convenient sensors for the microworld, nonfull measurements combined with observer techniques is proposed. Finally, the self-sensing principle, where the actuator is at the same time sensor, is applied and used for the feedback.