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A29 Ion-bombardment-enhanced etching of quartz(M4 processes and micro-manufacturing for science)
A29 Ion-bombardment-enhanced etching of quartz(M4 processes and micro-manufacturing for science)
2009
Takashi Okumoto
Jun Taniguchi
Sadao Momota
Yasuo Kogo
Noritaka Kawasegi
Noboru Morita
Keywords:
Focused ion beam
Quartz
Etching
Atomic force microscopy
Ion
Analytical chemistry
Chemistry
Nanotechnology
ion bombardment
Correction
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