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Analysis of the Basic Characteristic by Electrical Model of Aluminum Nitride Thin Film Pressure Sensor
Analysis of the Basic Characteristic by Electrical Model of Aluminum Nitride Thin Film Pressure Sensor
2005
Yasunobu Ooishi
Kazushi Kishi
Morito Akiyama
Hiroaki Noma
Tatsuo Tabaru
Keywords:
Materials science
Thin film
Composite material
Physical vapor deposition
Pressure sensor
Aluminium
Nitride
electrical model
Correction
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