Silicon wafer and glass substrate compatible conveying device

The invention relates to a silicon wafer and glass substrate compatible conveying device. The silicon wafer and glass substrate compatible conveying device comprises a conveying assembly, a silicon wafer positioning assembly and a glass substrate positioning assembly; the conveying assembly comprises a rodless cylinder, a connecting plate and a wafer bearing hand; the connecting plate is arranged on a sliding block of the rodless cylinder; the wafer bearing hand is fixedly connected onto the connecting plate; the silicon wafer positioning assembly comprises a silicon wafer clamping hand, a positioning pin and a first driving element; the silicon wafer clamping hand is arranged on the wafer bearing hand; the silicon wafer clamping hand and the positioning pin are used for positioning a silicon wafer; the silicon wafer is driven by the first driving element which is arranged on the wafer bearing hand to move along the Y direction; the glass substrate positioning assembly comprises a second driving element, a third driving element and a positioning block; a glass substrate is driven by the second driving element which is arranged on the wafer bearing hand to move along the Y direction; the glass substrate is driven by the third driving element which is arranged on the wafer bearing hand to move along the X direction; the positioning block is arranged on the wafer bearing hand and used for positioning the glass substrate. According to the silicon wafer and glass substrate compatible conveying device, the silicon wafer can be compatible with the glass substrate and the operation is simple.