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Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance
Microfabrication of SU-8 cantilever micro-force sensor integrated by copper piezoresistance
2011
褚金奎 Chu Jin-kui
陈兆鹏 Chen Zhao-peng
张然 Zhang Ran
Keywords:
Copper
Cantilever
Microfabrication
Analytical chemistry
Materials science
Optoelectronics
force sensor
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